Low Pressure Plasmas and Microstructuring Technology

Low Pressure Plasmas and Microstructuring Technology

Gerhard Franz

242,37 €
IVA incluido
Disponible
Editorial:
Springer Nature B.V.
Año de edición:
2010
ISBN:
9783642099397
242,37 €
IVA incluido
Disponible
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Sobre IBD

Collisions and cross sections.- The plasma.- DC discharges.- High-frequency discharges I.- High-frequency discharges II.- High-frequency discharges III.- Ion beam systems.- Plasma diagnostics.- Plasma deposition processes.- Plasma etch processes.- Etch Mechanisms.- Outlook.- Advanced Topics.

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